TXRS stainless steel silane combustion scrubber produced by our company is a waste gas purification equipment for treating silane, ammonia and other soluble gases. It is mainly used to treat the waste gas produced by solar cell production line industry and PECVD chemical vapor deposition process.

The product is mainly composed of stainless steel shell, combustion system, washing system and slag removal system. In terms of air intake, compressed air and fresh air intake are adopted to improve the operation efficiency and reliability of the product. In terms of spray system, the method of combining circulating water pump with automatic water replenishment is adopted, and the fan adopts the form of one for use and one for standby. These process characteristics greatly ensure the safety and reliability of this product. The internal combustion chamber adopts a special pressure relief device, which can work normally even when the internal pressure increases suddenly. At the same time, it is equipped with nitrogen inlet, which increases the safety of the equipment. In terms of dust collection, the static pressure deposition method is adopted, and the deposited dust is discharged through the slag discharge port, which makes the dust collection and treatment easier and more effective. According to the actual measurement by the authoritative department, the removal rate of silane (SiH4) in the customer unit is ≥ 99.99%, and the purification rate of ammonia (NHS) and other water-soluble gases is as high as 99.99%.